Chip-scale photonic sensors and associated FIB/SEM fabrication
This project exemplifies the quality work enabled by the nanofabrication capability of a Zeiss Auriga 60 FIB/SEM CrossBeam(TM) acquired and installed in 2012. We developed a method for the fabrication of nano-cavity photonic crystals utilizing the FIB/SEM in conjunction with the local injection and etching of XeF2 to demonstrate the accuracy and integrity of the desired nanostructured cavity arrays on chalcogenide micro-beams. The chalcogenide nano-photonic platform achieved superior sensitivity and specificity by means of nano-cavity enhanced photothermal mid-infrared spectroscopy.
Hongtao Lin, Lan Li, Fei Deng, Chaoying Ni, Sylvain Danto, J. David Musgraves, Kathleen Richardson, Juejun Hu, Demonstration of mid-infrared waveguide photonic crystal cavities, Optics Letters, 2013, Vol. 38 Issue 15, pp.2779-2782.
Vivek Singh, Pao Tai Lin, Neil Patel, Hongtao Lin, Lan Li, Yi Zou, Fei Deng, Chaoying Ni, Juejun Hu, James Giammarco, Anna Paola Soliani, Bogdan Zdyrko, Igor Luzinov, Spencer Novak, Jackie Novak, Peter Wachtel, Sylvain Danto, J David Musgraves, Kathleen Richardson, Lionel C Kimerling, Anuradha M Agarwal, Mid-infrared materials and devices on a Si platform for optical sensing, 2014, Sci. Technol. Adv. Mater. 15, 014603, doi:10.1088/1468-6996/15/1/014603.
Hongtao Lin, Yesh Chillakuru, Kati McLaughlin, Lan Li, Yi Zou, Fei Deng, Chaoying Ni, Sylvain Danto, JD Musgraves, K Richardson, Juejun Hu, Cavity-enhanced mid-infrared on-chip chemical sensing using high-Q chalcogenide glass resonators, Sensors, 2013 IEEE, Baltimore, MD, 1-4, 10.1109/ICSENS.2013.6688278.
Hongtao Lin, Yang Xiang, Lan Li, Kati McLaughlin, Yangchen Liu, Yeshwant Chillakuru, Erick Koontz, J David Musgraves, Kathleen Richardson, Chaoying Ni, Juejun Hu, High-Q mid-infrared chalcogenide glass resonators for chemical sensing, Photonics Society Summer Topical Meeting Series, July 2014 IEEE, Montreal, QC, 61-62, 10.1109/SUM.2014.42.